Fluorohydrogenated amorphous carbon (a-C:H, F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride
- 1 August 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 230 (2), 90-94
- https://doi.org/10.1016/0040-6090(93)90497-d
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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