Effect of diluent gases added during deposition on the etching characteristics of diamond-like carbon films
- 1 May 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 212 (1-2), 251-255
- https://doi.org/10.1016/0040-6090(92)90529-k
Abstract
No abstract availableKeywords
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