Self-assembled fluorocarbon films for enhanced stiction reduction
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1399-1402
- https://doi.org/10.1109/sensor.1997.635499
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- In Situ Phosphorus-doped Polysilicon For Integrated MemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A simple experimental technique for the measurement of the work of adhesion of microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- The effect of release-etch processing on surface microstructure stictionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Elimination of post-release adhesion in microstructures using conformal fluorocarbon coatingsJournal of Microelectromechanical Systems, 1997
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- FTIR and AFM Studies of the Kinetics and Self-Assembly of Alkyltrichlorosilanes and (Perfluoroalkyl)trichlorosilanes onto Glass and SiliconLangmuir, 1995
- Stability of ammonium fluoride-treated Si(100)Journal of Applied Physics, 1995
- Adsorption of perfluorinated n-alkanoic acids on native aluminum oxide surfacesJournal of Vacuum Science & Technology A, 1995
- Silanization of Solid Substrates: A Step Toward ReproducibilityLangmuir, 1994
- Tribology and Mechanics of Magnetic Storage DevicesPublished by Springer Nature ,1990