On the peculiarities of silicon amorphization at ion bombardment
- 16 August 1972
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 12 (2), 679-685
- https://doi.org/10.1002/pssa.2210120242
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
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- A note on integral equations of the kinchin-pease typeRadiation Effects, 1969
- Conversion of crystalline germanium to amorphous germanium by ion bombardmentPhilosophical Magazine, 1965