MEMS microswitch arrays for reconfigurable distributed microwave components
- 7 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 153-156 vol.1
- https://doi.org/10.1109/mwsym.2000.860909
Abstract
A novel MEMS switch design for use in microwave circuits is presented. The microswitch is capable of being configured in a multi-element X-Y array for use in tunable distributed circuits. Circuit design concepts using microswitch arrays and measurements of single microswitch performance are given.Keywords
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