GaAs-compatible surface-micromachined RF MEMS switches
- 1 January 1999
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 35 (3), 224-226
- https://doi.org/10.1049/el:19990032
Abstract
A MEMS switch has been developed for microwave applications. The switch has an actuation of 30 V, a response time of 20 µs, and mechanical robustness to withstand 109 actuations. An RF performance with >50 dB isolation below 2 GHz and <0.2 dB insertion loss from DC to 40 GHz has been measured.Keywords
This publication has 3 references indexed in Scilit:
- A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 GhzPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Microactuators for GaAs-based microwave integrated circuitsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- The integration of micro-machine fabrication with electronic device fabrication on III-V semiconductor materialsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002