Cracking and delamination of metal organic vapour and deposited alumina and silica films
- 15 August 1993
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 167 (1-2), 179-185
- https://doi.org/10.1016/0921-5093(93)90352-f
Abstract
No abstract availableKeywords
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