The properties of fluorocarbon films prepared by r.f. sputtering and plasma polymerization in inert and active gas
- 1 March 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 41 (3), 329-339
- https://doi.org/10.1016/0040-6090(77)90319-4
Abstract
No abstract availableKeywords
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