Plasma production by helicon waves
- 1 February 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (1), 5-10
- https://doi.org/10.1088/0963-0252/2/1/002
Abstract
High density plasma production using m=+1 and m=-1 helicon waves is studied. Characteristics of cylindrical helicon waves including effects of a vacuum gap between the plasma and the conducting wall and of a non-uniform density profile are presented. The m=+1 and m=-1 helicon modes are separately excited by a helical antenna, and the dependences of plasma density and antenna loading resistance on RF power are different for these modes.Keywords
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