Operational characteristics of microfabricated electric motors
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Principles in design and microfabrication of variable-capacitance side-drive motorsJournal of Vacuum Science & Technology A, 1990
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- Infrared analysis of film growth on the silicon surface in room airJournal of Vacuum Science & Technology A, 1989
- IC-processed electrostatic micromotorsSensors and Actuators, 1989