A LOCOS process for an electrostatic microfabricated motor
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 893-898
- https://doi.org/10.1016/0924-4247(90)87054-m
Abstract
No abstract availableKeywords
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