GaAs Circuit Restructuring by Multi-Level Laser-Direct-Written Tungsten Process
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Multilevel interconnections for wafer scale integrationJournal of Vacuum Science & Technology A, 1986
- Excimer laser etching of polymersJournal of Applied Physics, 1986
- Laser microchemical techniques for reversible restructuring of gate-array prototype circuitsIEEE Electron Device Letters, 1984
- Laser microreaction for deposition of doped silicon filmsApplied Physics Letters, 1981
- Electrical properties of laser chemically doped siliconApplied Physics Letters, 1981