Ultrahigh-brightness, femtosecond ArF excimer laser system
- 15 March 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (11), 1203-1205
- https://doi.org/10.1063/1.108734
Abstract
An ultrahigh-brightness ArF excimer laser system is described that is capable of generating pulse energies of 60 mJ with a pulse duration of ~700 fs. The system utilizes a newly developed seed pulse generation scheme based on spectrally compensated sum-frequency mixing in beta-barium metaborate (BBO), and a double-pass discharge pumped ArF excimer preamplifier followed by an electron beam pumped power amplifierKeywords
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