Laser photochemical microalloying for etching of aluminum thin films
- 15 March 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (6), 399-401
- https://doi.org/10.1063/1.92394
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Application of the backscattering method for the measurement of diffusion of zinc in aluminiumPhysica Status Solidi (a), 1973
- Pyrolysis of dimethylzinc and dimethylzinc-d6 by the toluene carrier methodCanadian Journal of Chemistry, 1970