Preparation of turbostratic and cubic boron-nitride films by electron-cyclotron-resonance, plasma-assisted, chemical vapour deposition
- 1 December 1994
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science: Materials in Electronics
- Vol. 5 (6), 324-328
- https://doi.org/10.1007/bf00215567
Abstract
No abstract availableKeywords
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