Preparation of Superconducting YBa2Cu3O7-x Films by ECR Plasma Sputtering
- 1 January 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (1A), L88
- https://doi.org/10.1143/jjap.28.l88
Abstract
Y-Ba-Cu-O films were prepared on (100)MgO single crystal substrates by ECR plasma sputtering. As-deposited films without substrate heating were amorphous and electrically insulating. The amorphous film was crystallized to YBa2Cu3O7-x by postannealing at 930°C for 1 min in O2 gas, and the T c of the postannealed film was 70.5 K. The film prepared at the substrate temperature of 650°C was crystalline YBa2Cu3O7-x and the T c of the film without any postannealing was 73 K.Keywords
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