Liquid crystal polymer (LCP) for MEMS: processes and applications
- 27 May 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (5), 628-633
- https://doi.org/10.1088/0960-1317/13/5/314
Abstract
In this paper we discuss newly developed microfabrication methods for liquid crystal polymer (LCP). LCP is a thermoplastic polymer made of aligned molecule chains with crystal-like spatial regularity. It exhibits unique electrical, physical and chemical properties, making it suitable for certain MEMS applications. MEMS-compatible fabrication processes such as metallization, plasma bulk etching and thermal bonding have been developed in our work. We demonstrated two micro sensor applications involving the LCP material.Keywords
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