Monte Carlo Calculations on Electron Scattering in a Solid Target
- 1 June 1971
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 10 (6), 678
- https://doi.org/10.1143/jjap.10.678
Abstract
The Monte Carlo technique using a simple single scattering model, different from Reimer's, is applied to the field of the Electron Probe Microanalyzer (EPMA) and the Scanning Electron Microscope (SEM). The calculations show fairly good agreement with the experiments on back-scattered electrons, energy dissipation, characteristic X-ray production and secondary electron emission. Also the electron trajectories are depicted on the chart by the plotter connected with the digital computer.Keywords
This publication has 10 references indexed in Scilit:
- NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPEApplied Physics Letters, 1970
- The Penetration of Electrons into Luminescent MaterialsProceedings of the Physical Society, 1963
- Theory of Multiple Scattering: Second Born Approximation and Corrections to Molière's WorkPhysical Review B, 1959
- Zur Rückstreuung von Elektronen im Energiebereich von 10 bis 100 keVAnnalen der Physik, 1957
- The Intensity of Emission of Characteristic X-RadiationProceedings of the Physical Society. Section A, 1956
- Dependence of Secondary Electron Emission upon Angle of Incidence of 1.3-Mev PrimariesPhysical Review B, 1956
- Sur les bases physiques de l'analyse ponctuelle par spectrographie XJournal de Physique et le Radium, 1955
- Energieverteilung rückdiffundierter ElektronenThe European Physical Journal A, 1954
- The Multiple Scattering of Fast ElectronsPhysical Review B, 1942
- Zwei Bemerkungen ber die Zerstreuung korpuskularer Strahlen als BeugungserscheinungThe European Physical Journal A, 1926