Monte Carlo Calculations on Electron Scattering in a Solid Target

Abstract
The Monte Carlo technique using a simple single scattering model, different from Reimer's, is applied to the field of the Electron Probe Microanalyzer (EPMA) and the Scanning Electron Microscope (SEM). The calculations show fairly good agreement with the experiments on back-scattered electrons, energy dissipation, characteristic X-ray production and secondary electron emission. Also the electron trajectories are depicted on the chart by the plotter connected with the digital computer.