Characterization of PZT thin films for micromotors
- 31 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4), 67-70
- https://doi.org/10.1016/0167-9317(95)00116-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Measurement of piezoelectric coefficients of ferroelectric thin filmsJournal of Applied Physics, 1994
- Similarities between piezoelectric, thermal and other internal means of exciting vibrationsJournal of Micromechanics and Microengineering, 1993
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- Ultrasonic Motor Utilizing Elastic Fin RotorJapanese Journal of Applied Physics, 1991