An ASIC for high-resolution capacitive microaccelerometers
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 278-281
- https://doi.org/10.1016/0924-4247(90)85054-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Precision accelerometers with μg resolutionSensors and Actuators A: Physical, 1990
- A micromechanical capacitive accelerometer with a two-point inertial-mass suspensionSensors and Actuators, 1983