A micromechanical capacitive accelerometer with a two-point inertial-mass suspension
- 31 December 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 191-198
- https://doi.org/10.1016/0250-6874(83)85024-0
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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