Observation of silicon wafer emissivity in rapid thermal processing chambers for pyrometric temperature monitoring
- 18 June 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (25), 2513-2515
- https://doi.org/10.1063/1.102874
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Spectral Emissivity of SiliconJapanese Journal of Applied Physics, 1967
- Experimental Proof of the Existence of a New Electronic Complex in SiliconPhysical Review Letters, 1960