Rapid Growth of Diamond Films by Arc Discharge Plasma CVD
- 1 September 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (9A), L1600-1602
- https://doi.org/10.1143/jjap.27.l1600
Abstract
Diamond films have been synthsized by arc discharge plasma CVD in a hydrogen-argon-ethanol mixture gas. The arc discharge power is about 560 W and the typical gas flow rate is 500–2000 cm3/min, respectively. The growth rate of diamond films has been obtained about 200–250 µm/h which is higher than that of other CVD methods. The obtained diamond films are identified as natural cubic diamond by X-ray diffraction. It is found that graphitic and amorphous carbon are not contained in the diamond films by Raman spectra. Atomic hydrogen (H) plays important roles in the growth of high-quality diamonds.Keywords
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