Helium Microprobe Analysis of Semiconductor Materials
- 1 April 1983
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 30 (2), 1228-1231
- https://doi.org/10.1109/tns.1983.4332495
Abstract
The Melbourne University nuclear microprobe is described. Recent improvements have enabled beam spot sizes of 1 μm to be obtained. Some applications of the probe to the analysis of semiconductor materials are discussed, in particular the use and map disp, lay of channeling over microscopic areas.Keywords
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