Pzt Interaction with Metal and Oxides Studied by Rutherford Backscattering Spectrometry
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applicationsFerroelectrics, 1990
- Reactions of Zr thin films with SiO2 substratesJournal of Applied Physics, 1988
- The use of the 3.05 MeV oxygen resonance for 4He backscattering near-surface analysis of oxygen-containing high Z compoundsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988