Low dielectric fluorinated amorphous carbon thin films grown from C6F6 and Ar plasma
- 13 October 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 374 (1), 103-108
- https://doi.org/10.1016/s0040-6090(00)01021-x
Abstract
No abstract availableKeywords
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