Deposition of Ti–Al–N coatings by thermal CVD
- 1 November 2008
- journal article
- Published by Elsevier in International Journal of Refractory Metals and Hard Materials
- Vol. 26 (6), 563-568
- https://doi.org/10.1016/j.ijrmhm.2008.01.003
Abstract
No abstract availableKeywords
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