The realization and design considerations of a flip-chip integrated MEMS tunable capacitor
- 20 March 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 80 (2), 108-118
- https://doi.org/10.1016/s0924-4247(99)00255-1
Abstract
No abstract availableKeywords
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