Silicon diaphragm pressure sensors fabricated by anodic oxidation etch-stop
- 1 January 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 13 (1), 63-70
- https://doi.org/10.1016/0250-6874(88)85029-7
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- An IC Piezoresistive Pressure Sensor for Biomedical InstrumentationIEEE Transactions on Biomedical Engineering, 1973
- Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped SiliconJournal of the Electrochemical Society, 1971
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969
- Recent developments in semiconductor piezoresistive devicesSolid-State Electronics, 1963