Analysis And Design Concept Of Highly Sensitive Silicon Gyroscope
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 612-615
- https://doi.org/10.1109/sensor.1995.721906
Abstract
No abstract availableKeywords
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- Piezoelectric beams and vibrating angular rate sensorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991
- Electronic Effects in the Elastic Constants of-Type SiliconPhysical Review B, 1967