Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering
- 1 November 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 332 (1-2), 230-234
- https://doi.org/10.1016/s0040-6090(98)01061-x
Abstract
No abstract availableKeywords
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