Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure
- 1 June 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (2), 183-185
- https://doi.org/10.1088/0960-1317/5/2/034
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- The application of fine-grained, tensile polysilicon to mechanicaly resonant transducersSensors and Actuators A: Physical, 1990