The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 346-351
- https://doi.org/10.1016/0924-4247(90)85069-g
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fabrication of micromechanical devices from polysilicon films with smooth surfacesSensors and Actuators, 1989
- Fine-grained polysilicon films with built-in tensile strainIEEE Transactions on Electron Devices, 1988
- Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical propertiesSensors and Actuators, 1983