High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE
- 7 November 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 108 (1-3), 91-96
- https://doi.org/10.1016/s0924-4247(03)00260-7
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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