Dry etching damage of silicon: A review
- 1 October 1989
- journal article
- review article
- Published by Elsevier in Materials Science and Engineering B
- Vol. 4 (1-4), 441-450
- https://doi.org/10.1016/0921-5107(89)90284-5
Abstract
No abstract availableThis publication has 61 references indexed in Scilit:
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