Ellipsometric study of 400ev ion damage in silicon
- 31 May 1972
- journal article
- Published by Elsevier in Surface Science
- Vol. 30 (3), 632-640
- https://doi.org/10.1016/0039-6028(72)90051-9
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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