Miniature high current metal ion source

20 October 1986

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 49 (16), 1019-1021
https://doi.org/10.1063/1.97458

Abstract

A small, simple ion source for the production of high brightness beams of metal ions is described. A metal vapor vacuum arc discharge is used to establish the high density plasma from which the ion beam is extracted. The source is finger sized, and can produce pulsed metal ion beams with current up to the 10-mA range.

Keywords

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