Hybrid ultrasonic micromachined motors
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Ultrasonic micromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Ferroelectric thin film ultrasonic micromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- Ultrasonic Motor Utilizing Elastic Fin RotorJapanese Journal of Applied Physics, 1991
- Compatibility of zinc oxide with silicon IC processingSensors and Actuators A: Physical, 1990
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982
- Natural Frequencies of Transversely Vibrating Uniform Annular PlatesJournal of Applied Mechanics, 1965