Sputtering of molecules
- 1 January 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 18 (1-6), 587-595
- https://doi.org/10.1016/s0168-583x(86)80093-3
Abstract
No abstract availableKeywords
This publication has 39 references indexed in Scilit:
- Sputtering of large molecular ions by low energy particle impactNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Cluster ions from keV-energy ion and atom bombardment of frozen gasesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Astrophysical implications of ice sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Rotational and vibrational excitation of sputtered diatomic moleculesThe European Physical Journal A, 1984
- Rotational and vibrational excitation of sputtered diatomic moleculesThe European Physical Journal A, 1984
- Argon-ion assisted etching of silicon by molecular chlorineJournal of Applied Physics, 1984
- Chemical sputtering by keV ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Secondary ion mass spectrometry of low-temperature solidsInternational Journal of Mass Spectrometry and Ion Physics, 1983
- Investigation of ion impact desorption of atoms and molecules by low energy ion scattering (ISS)Nuclear Instruments and Methods, 1978
- Sputtering of Surfaces by Positive Ion Beams of Low EnergyJournal of Applied Physics, 1958