In situ investigation of the growth of microcrystalline silicon obtained by alternating deposition and hydrogen-etching sequences
- 1 January 1991
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 137-138, 791-794
- https://doi.org/10.1016/s0022-3093(05)80239-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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