Elastic constants and hardness of ion-beam-sputtered TiNx films measured by Brillouin scattering and depth-sensing indentation
- 1 March 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (5), 3053-3057
- https://doi.org/10.1063/1.348963
Abstract
TiNx films of various composition have been prepared by reactive‐ion‐beam sputtering at a deposition temperature of 50 °C. Young’s modulus E and hardness H of these films were measured by a depth‐sensing nanoindentation technique, whereas the shear modulus G was obtained by a measurement of the velocity of the acoustic surface wave by Brillouin light scattering. The study was extended over a wide range of stoichiometries, 0≤x≤0.8. A proportionality between E and H has been observed.Keywords
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