Improved Surface Smoothness of YBa2Cu3Oy Films and Related Multilayers by ArF Excimer Laser Deposition with Shadow Mask “Eclipse Method”
- 1 March 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (3B), L417
- https://doi.org/10.1143/jjap.33.l417
Abstract
By simply placing a shadow mask between the target material and substrate, the particle (or droplet) problem peculiar to the excimer laser deposition technique was completely eliminated. It is tentatively called the “ eclipse method”, in which the deposition proceeds through only diffusion. Mirrorlike YBa2Cu3O y thin films with T c as high as 90–93 K were obtained reproducibly by (eclipse) ArF excimer laser ablation on MgO substrates in 0.3 Torr O2 ambient. The growth rate reduction was only 70% under this ambient condition. Even when the pressed-powder targets were employed for deposition, the metal-insulator-superconductor (MIS) layered structure seldom encountered the pinhole problem.Keywords
This publication has 8 references indexed in Scilit:
- Crossed fluxes technique for pulsed laser deposition of smooth YBa2Cu3O7−x films and multilayersApplied Physics Letters, 1993
- Precipitates in YBa2Cu3O7−δ thin films annealed at low oxygen partial pressureApplied Physics Letters, 1993
- Heteroepitaxial Growth of c-Axis-Oriented BaTiO3 Thin Films with an Atomically Smooth SurfaceJapanese Journal of Applied Physics, 1993
- Off-axis laser deposition of YBa2Cu3O7−δ thin filmsApplied Physics Letters, 1992
- Surface outgrowth problem in c-axis oriented Y-Ba-Cu-O superconducting thin filmsApplied Physics Letters, 1991
- Laser Excitation Effects on Laser Ablated Particles in Fabrication of High Tc Superconducting Thin FilmsJapanese Journal of Applied Physics, 1991
- Origin of surface roughness for c-axis oriented Y-Ba-Cu-O superconducting filmsApplied Physics Letters, 1990
- Laser wavelength dependent properties of YBa2Cu3O7−δ thin films deposited by laser ablationApplied Physics Letters, 1989