Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD
- 31 May 1996
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 209 (1-2), 414-419
- https://doi.org/10.1016/0921-5093(95)10113-6
Abstract
No abstract availableKeywords
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