Fabrication and testing investigation of low-voltage integrated electrophoresis chip based on silicon-on-insulator-MEMS
- 1 July 2007
- journal article
- Published by SPIE-Intl Soc Optical Eng in Journal of Micro/Nanolithography, MEMS, and MOEMS
- Vol. 6 (3), 033009-033009-7
- https://doi.org/10.1117/1.2770459
Abstract
A new approach has been developed to fabricate a low-voltage integrated electrophoresis chip based on silicon-on-insulator micro electron mechanical systems (SOI-MEMS). Arrayed-electrodes are embedded along the microchannel sidewall in the designed microchip. Because voltage should be applied effectively to arrayed-electrodes to serve as the driving force for the on-microchip electrophoresis, electrical isolation between arrayed-electrodes is essential for a practicable low-voltage integrated electrophoresis chip. Fabrication of arrayed-electrodes becomes the critical technique that governs the performance of the low-voltage integrated electrophoresis chip. Combined with the SOI substrate, full dielectric isolation is proposed to obtain high-performance integrated three-dimensional (3-D) sidewall arrayed-electrodes. The fabrication processes mainly consist of SOI wafer fabrication, narrow trench etching, polysilicon refilling and planarization, boron diffusion to form arrayed-electrodes, elicitation and protection of arrayed-electrodes, dry etching to obtain reservoirs and microchannels, etc. In order to obtain high-quality electrical isolation between arrayed-electrodes, process experiments were conducted to obtain optimized operational parameters. Poly (dimethylsiloxane) (PDMS) was selected as a cover to achieve a hybrid electrophoresis chip. The validity of the hybrid electrophoresis chip was tested by amino acid separation. Results showed high performance of the fabricated low-voltage integrated electrophoresis chip based on SOI-MEMS.Keywords
This publication has 7 references indexed in Scilit:
- Low‐voltage driven control in electrophoresis microchips by traveling electric fieldElectrophoresis, 2003
- An Integrated Fritless Column for On-Chip Capillary Electrochromatography with Conventional Stationary PhasesAnalytical Chemistry, 2002
- Design of low voltage-driven capillary electrophoresis chips using moving electrical fieldsSensors and Actuators B: Chemical, 2001
- Arrayed-electrode design for moving electric field driven capillary electrophoresis chipsSensors and Actuators B: Chemical, 2001
- Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)Analytical Chemistry, 1998
- Microchannel Electrophoretic Separations of DNA in Injection-Molded Plastic SubstratesAnalytical Chemistry, 1997
- Silicon-to-silicon direct bonding methodJournal of Applied Physics, 1986