Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide
- 1 September 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 176 (2), 277-282
- https://doi.org/10.1016/0040-6090(89)90100-4
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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