Abstract
This paper shows that multiple-trapping-dominated transport quantities such as mobility and diffusion exhibit a Meyer-Neldel relation (MNR), an exponential relation between the prefactor of a thermally activated process and its activation energy. From these results, the Meyer-Neldel parameters can be related to the energy distribution of trapping sites and microscopic transport properties. The MNR for both the mobility of charge carriers and the annealing rate of metastable defects in hydrogenated amorphous silicon are quantitatively explained.