Resolution improvement of ion projector with a low energy spread multicusp ion source
- 1 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4), 477-480
- https://doi.org/10.1016/s0167-9317(99)00044-1
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- A review of ion projection lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- DUV resist UV II HS applied to high resolution electron beam lithography and to masked ion beam proximity and reduction printingMicroelectronic Engineering, 1998