Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 6, 222-226
- https://doi.org/10.1109/memsys.1990.110280
Abstract
A driving method suitable for a micro mechanism is introduced. It utilizes friction and inertial force caused by rapid deformations of piezoelectric elements. A one-dimensional linear positioner using this mechanism consists of one main object put on a guiding surface, a piezo, and a weight. The weight is connected to one end of the main object via the piezo. By controlling rapid extension or contraction of the piezo, it can make step-like movements of several nanometers up to ten micrometers bidirectionally against friction. By repeating this step movement, it can move for a long distance. Using this mechanism, two types of joints for micro robot arm are developed. One is a simple rotating joint with an arm of 5 cm, and the other is a three-degree-of-freedom (DOF) joint with an 8 cm arm. Minimum step movements of the two joints were smaller than 0.1 mu m and maximum velocities were larger than 2 mm/sec at the end of the arm. Combining two joints, a four-DOF micro robot arm was developed.<>Keywords
This publication has 2 references indexed in Scilit:
- Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elementsJournal of Vacuum Science & Technology A, 1990
- A dual tunneling-unit scanning tunneling microscopeJournal of Vacuum Science & Technology A, 1990