Interaction in Cu/Al and Pt/Cu/Al thin films: Competing oxygen effects and preferential reaction between Pt and CuAl alloy
- 1 February 1984
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (3), 310-312
- https://doi.org/10.1063/1.94735
Abstract
The effects of oxygen on the interactions of the Cu-Al thin-film system are studied using both Cu/Al and Pt/Cu/Al structures. For the Cu/Al structure, oxygen-enhanced outdiffusion of Al and accumulation of Al on the Cu surface are observed. Using the Pt/Cu/Al structure, however, no surface accumulation of Al on Pt is observed; instead, the observed interdiffusion and alloy formation between Cu and Al are both suppressed by oxygen. At increasing temperatures, Al preferentially outdiffuses from the CuAl alloy to form a Pt Al alloy with the top Pt layer. This last process is also suppressed by oxygen, similar to the binary Pt/Al system reported previously. The mechanisms for the competing interactions and ambient effects observed are discussed.Keywords
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