The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations
- 22 May 2003
- journal article
- Published by Elsevier in Journal of the Mechanics and Physics of Solids
- Vol. 51 (8), 1551-1572
- https://doi.org/10.1016/s0022-5096(03)00050-4
Abstract
No abstract availableKeywords
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